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1

Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma

Hyo-Chang Lee, Jin-Young Bang, Chin-Wook Chung

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 690 KB

english, 2011

2

Comparisons of the electrical characteristics by impedance matching conditions on the E–H and H–E transition and the hysteresis of inductively coupled plasma

Hyo-Chang Lee, Chin-Wook Chung

Journal:

Thin Solid Films

Year:

2012

Language:

english

File:

PDF, 287 KB

english, 2012

3

Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas

Choi, Ikjin, Kim, Aram, Lee, Hyo-Chang, Kim, Dong-Hwan, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2017

Language:

english

File:

PDF, 1.18 MB

english, 2017

4

Plasma density measurement and downstream etching of silicon and silicon oxide in Ar/NF_3 mixture remote plasma source

Yeom, Hee Jung, Choi, Dae Han, Lee, Young Seok, Kim, Jung-Hyung, Seong, Dae Jin, You, ShinJae, Lee, Hyo-Chang

Journal:

Plasma Science and Technology

Year:

2019

Language:

english

File:

PDF, 875 KB

english, 2019

5

Properties of epoxy molding compound according to the pretreatment method of an amino-silane coupling agent on epoxy or phenol resin

Jung-Hyun Lee, Hyo-Chang Yoon

Journal:

Journal of Applied Polymer Science

Year:

2006

Language:

english

File:

PDF, 197 KB

english, 2006

6

Impedance transition and series resonance between bulk plasma and sheath in biased inductively coupled plasma

Hyo-Chang Lee, Chin-Wook Chung

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 302 KB

english, 2010

7

E–H mode transition in inductively coupled plasma using Ar, O2, N2, and mixture gas

Jung-Kyu Lee, Hyo-Chang Lee, Chin-Wook Chung

Journal:

Current Applied Physics

Year:

2011

Language:

english

File:

PDF, 972 KB

english, 2011

8

Mode transition of power dissipation and plasma parameters in an asymmetric capacitive discharge

Lee, Soo-Jin, Lee, Hyo-Chang, Bang, Jin-young, Oh, Seung-Ju, Chung, Chin-Wook

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 779 KB

english, 2013

9

Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma

Lee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook

Journal:

Applied Physics Letters

Year:

2010

Language:

english

File:

PDF, 376 KB

english, 2010

10

Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma

Han, Duksun, Lee, Hyo-Chang, Kim, H J, Kim, Yu Sin, Chung, Chin-Wook, Chae, Heesun

Journal:

Plasma Sources Science and Technology

Year:

2013

Language:

english

File:

PDF, 1.12 MB

english, 2013

11

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

Kim, Jin-Yong, Lee, Hyo-Chang, Kim, Young-Do, Kim, Young-Cheol, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2013

Language:

english

File:

PDF, 1.09 MB

english, 2013

12

Review of inductively coupled plasmas: Nano-applications and bistable hysteresis physics

Journal:

Applied Physics Reviews

Year:

2018

Language:

english

File:

PDF, 6.54 MB

english, 2018

13

Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges

You, K. H., Schulze, J., Derzsi, A., Donkó, Z., Yeom, H. J., Kim, J. H., Seong, D. J., Lee, Hyo-Chang

Journal:

Physics of Plasmas

Year:

2019

Language:

english

File:

PDF, 2.04 MB

english, 2019

14

Hermite–Gaussian and Laguerre–Gaussian beams beyond the paraxial approximation

Hyo-Chang Kim, Yeon H. Lee

Journal:

Optics Communications

Year:

1999

Language:

english

File:

PDF, 84 KB

english, 1999

15

Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas

Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physical Review E

Year:

2010

Language:

english

File:

PDF, 319 KB

english, 2010

16

Higher-order corrections to the electric field vector of a Gaussian beam

Kim, Hyo-Chang, Lee, Yeon H.

Journal:

Journal of the Optical Society of America A

Year:

1999

Language:

english

File:

PDF, 182 KB

english, 1999

17

Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma

Lee, Hyo-Chang, Kim, Young-Cheol, Chung, Chin-Wook

Journal:

IEEE Transactions on Plasma Science

Year:

2011

Language:

english

File:

PDF, 316 KB

english, 2011

18

Enhancement of hydrogen production by recycling of methanogenic effluent in two-phase fermentation of food waste

Sang-Hyoun Kim, Hyo-Chang Cheon, Chae-Young Lee

Journal:

International Journal of Hydrogen Energy

Year:

2012

Language:

english

File:

PDF, 460 KB

english, 2012

19

Spatial measurements of electron energy distribution and plasma parameters in a weakly magnetized inductive discharge

Kim, Young-Do, Lee, Young-Kwang, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2013

Language:

english

File:

PDF, 882 KB

english, 2013

20

Experimental observation of the skin effect on plasma uniformity in inductively coupled plasmas with a radio frequency bias

Lee, Hyo-Chang, Oh, SeungJu, Chung, Chin-Wook

Journal:

Plasma Sources Science and Technology

Year:

2012

Language:

english

File:

PDF, 247 KB

english, 2012

21

A study on the maximum power transfer condition in an inductively coupled plasma using transformer circuit model

Kim, Young-Do, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2013

Language:

english

File:

PDF, 685 KB

english, 2013

22

Effect of antenna size on electron kinetics in inductively coupled plasmas

Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2013

Language:

english

File:

PDF, 1.24 MB

english, 2013

23

Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas

Lee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook

Journal:

Applied Physics Letters

Year:

2010

Language:

english

File:

PDF, 357 KB

english, 2010

24

Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas

Kim, Young-Cheol, Jang, Sung-Ho, Oh, Se-Jin, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Review of Scientific Instruments

Year:

2013

Language:

english

File:

PDF, 1.86 MB

english, 2013

25

Colorimetric polydiacetylene for plasma diagnostics

Lee, Hyo-Chang, Jeon, Seongho, Kim, Jong-Man, Chung, Chin-Wook

Journal:

Sensors and Actuators B: Chemical

Year:

2014

Language:

english

File:

PDF, 1.37 MB

english, 2014

26

Control of electron energy distribution by adding a pulse inductive field in capacitive discharge

Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Plasma Sources Science and Technology

Year:

2014

Language:

english

File:

PDF, 890 KB

english, 2014

27

Effect of adding small amount of inductive fields to O2, Ar/O2 capacitively coupled plasmas

Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Journal of Applied Physics

Year:

2012

Language:

english

File:

PDF, 537 KB

english, 2012

28

[IEEE Comput. Soc 1999 Pacific Rim International Symposium on Dependable Computing - Hong Kong (16-17 Dec. 1999)] Proceedings 1999 Pacific Rim International Symposium on Dependable Computing - Reliable probabilistic checkpointing

Hyo-Chang Nam,, Jong Kim,, Sungle Hong,, Sunggu Lee,

Year:

1999

Language:

english

File:

PDF, 201 KB

english, 1999

29

Enhanced Plasma Uniformity in RF Plasma With Side Multihole

Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

IEEE Transactions on Plasma Science

Year:

2014

Language:

english

File:

PDF, 597 KB

english, 2014

30

[IEEE 2010 IEEE 10th Conference on Nanotechnology (IEEE-NANO) - Ilsan, Gyeonggi-Do, Korea (South) (2010.08.17-2010.08.20)] 10th IEEE International Conference on Nanotechnology - Inductively coupled RF heating of nano-particle for non-invasive and selective cancer cell destruction

Hyo-Chang Lee,, Jung-Kyu Lee,, Seung-Ju Oh,, Chin-Wook Chung,

Year:

2010

File:

PDF, 278 KB

2010

31

Study on Plasma Uniformity Using 2-D Measurement Method in Argon Inductively Coupled Plasmas

Kim, Young-Cheol, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

IEEE Transactions on Plasma Science

Year:

2014

Language:

english

File:

PDF, 363 KB

english, 2014

32

Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas

Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Applied Physics Letters

Year:

2008

Language:

english

File:

PDF, 441 KB

english, 2008

33

Low energy electron heating and evolution of the electron energy distribution by diluted O[sub 2] in an inductive Ar/O[sub 2] mixture discharge

Lee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2010

Language:

english

File:

PDF, 338 KB

english, 2010

34

Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge

Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Applied Physics Letters

Year:

2012

Language:

english

File:

PDF, 1.25 MB

english, 2012

35

Plasma diagnostic method using intermodulation frequencies in a Langmuir probe

Kim, Dong-Hwan, Lee, Hyo-Chang, Kim, Yu-Sin, Chung, Chin-Wook

Journal:

Applied Physics Letters

Year:

2013

Language:

english

File:

PDF, 1.22 MB

english, 2013

36

[IEEE Comput. Soc IEEE 27th International Symposium on Fault Tolerant Computing - Seattle, WA, USA (24-27 June 1997)] Proceedings of IEEE 27th International Symposium on Fault Tolerant Computing - Probabilistic checkpointing

Hyo-Chang Nam,, Jong Kim,, SungJe Hong,, Sunggu Lee,

Year:

1997

Language:

english

File:

PDF, 919 KB

english, 1997

37

Control of plasma density distribution via wireless power transfer in an inductively coupled plasma

Lee, Hee-Jin, Lee, Hyo-Chang, Kim, Young-Cheol, Chung, Chin-Wook

Journal:

Plasma Sources Science and Technology

Year:

2013

Language:

english

File:

PDF, 362 KB

english, 2013

38

Electron heating and control of electron energy distribution for the enhancement of the plasma ashing processing

Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Plasma Sources Science and Technology

Year:

2015

Language:

english

File:

PDF, 1.01 MB

english, 2015

39

Experimental investigation of edge-to-center density ratio in inductively coupled plasmas

Kim, Gun-Ho, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2010

Language:

english

File:

PDF, 258 KB

english, 2010

40

Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma

Lee, Hyo-Chang, Lee, Jung-Kyu, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2010

Language:

english

File:

PDF, 127 KB

english, 2010

41

Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes

Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2012

Language:

english

File:

PDF, 1.05 MB

english, 2012

42

Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases

Lee, Hyo-Chang, Hwang, Hye-Ju, Kim, Young-Cheol, Kim, June Young, Kim, Dong-Hwan, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2013

Language:

english

File:

PDF, 1.96 MB

english, 2013

43

Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas

Kim, Young-Do, Kim, Yu-Sin, Lee, Hyo-Chang, Bang, Jin-Young, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2011

Language:

english

File:

PDF, 328 KB

english, 2011

44

Measurement of sheath thickness at a floating potential

Han, Hyung-Sik, Lee, Hyo-Chang, Oh, Se-Jin, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2014

Language:

english

File:

PDF, 1.18 MB

english, 2014

45

Observation of pressure gradient and related flow rate effect on the plasma parameters in plasma processing reactor

Lee, Hyo-Chang, Kim, Aram, Moon, Se Youn, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2011

Language:

english

File:

PDF, 548 KB

english, 2011

46

E-H heating mode transition in inductive discharges with different antenna sizes

Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2015

Language:

english

File:

PDF, 1.46 MB

english, 2015

47

Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas

Han, Duksun, Lee, Hyo-Chang, Bang, Jin-Young, Chung, Chin-Wook, Moon, Se Youn

Journal:

Current Applied Physics

Year:

2015

Language:

english

File:

PDF, 1020 KB

english, 2015

48

Variation of the electron energy distribution with He dilution in an inductively coupled argon discharge

Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2012

Language:

english

File:

PDF, 844 KB

english, 2012

49

Discharge mode transition and hysteresis in inductively coupled plasma

Lee, Hyo-Chang, Kim, Dong-Hwan, Chung, Chin-Wook

Journal:

Applied Physics Letters

Year:

2013

Language:

english

File:

PDF, 549 KB

english, 2013

50

Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas

Kim, Young-Cheol, Kim, June Young, Lee, Hyo-Chang, Kim, Yu-Sin, Kim, Jin-Yong, Cho, Sung-Won, Chung, Chin-Wook

Journal:

Applied Physics Letters

Year:

2015

Language:

english

File:

PDF, 718 KB

english, 2015

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